p-Type nitrogen doped ZnO was studied by using extended X-ray absorption. ne structure (EXAFS) at the Zn K edge. The p-type ZnO was fabricated on glass substrates by a low cost catalyst-free thermal evaporation process. The EXAFS measurement showed that the bonding length of Zn-O and Zn-Zn was increased after converting to p-type due to the incorporation of nitrogen atoms. The EXAFS analysis indicated that N atoms might exist as diatom form of N-N in ZnO film. (C) 2009 Published by Elsevier B. V.