Surface roughness has been widely studied in many systems. Here we present a roughness study of NiFeMo magnetic films, of interest for their good soft magnetic properties. A peak is observed in the saturation roughness w(sat) for measured film thickness t approximate to 100 nm. The coercivity also changes rapidly as the film thickness increases, decreasing from over 100 Oe for t = 32 nm to under 10 Oe for t = 107 nm. Films with t between 2.4 and 6 mu m have a very low saturation roughness of only similar to 2.4 +/- 0.1 nm and a coercivity of <= 0.5 Oe. (C) 2008 The Electrochemical Society. [DOI: 10.1149/1.3050351] All rights reserved.