The paper presents a method for mesostructured cobalt oxide sensor fabrication by the template replication method and immobilization using dielectrophoresis process. The method consists of enriching the mesostructured cobalt oxide particles in a microelectrode gap that drove mesostructured cobalt oxide particles to a high electric field region and then exposed to CO gas. The cobalt oxide sensor has improved sensing performance in carbon monoxide (CO) detection at concentration as low as 10 ppm and a very short recovering time, due to the higher surface area.