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Electrochemical and Solid State Letters, Vol.12, No.7, H256-H258, 2009
High Performance Solution-Processed and Lithographically Patterned Zinc-Tin Oxide Thin-Film Transistors with Good Operational Stability
We demonstrate high mobility and good stability sol-gel-processed and lithographically patterned amorphous zinc-tin oxide (a-ZTO) thin-film transistors (TFTs). The a-ZTO TFTs (W/L=100/5 mu m) have shown a carrier mobility >5 cm(2)/V s with an on/off current ratio greater than 10(8) and a subthreshold slope < 1.0 V. The devices including solution-processed poly(methyl methacrylate)/silica dual passivation layer on the active channel have typically shown threshold voltage variations < 0.5-1 V after 1 h current and voltage bias stressing.
Keywords:amorphous semiconductors;Hall mobility;II-VI semiconductors;lithography;passivation;sol-gel processing;thin film transistors;tin compounds;wide band gap semiconductors;zinc compounds