We proposed a design and fabrication technique for a micro proton exchange membrane fuel cell (mu-PEMFC). Thin current collector plates had microgrooves for fuel supply. Microgrooves with a line and space of 100-500 mu m and depth of 112 mu m were fabricated by using microfabrication technologies. Maximum power density increased with increasing line and space of the fuel channel, and a high power density of 109 mW/cm(2) was achieved at the line and space of 100 mu m. Ohmic resistance decreased with increasing line and space of the fuel channel. A low ohmic resistance of 0.26 cm(2) was determined. These results were comparable to the conventional PEMFC, and preliminary test results showed that our mu-PEMFC is as useful as a miniature PEMFC.