Scanning electron microscopy-energy-dispersive spectrometry (SEM-EDS) is it conventional method to study spatial compositional distribution in ash-related samples collected from various power plant boilers. Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) is an attractive alternative that call provide related information. In this work, we have analyzed deposits on seven water-cooled deposition probes by both SEM-EDS and LA-ICP-MS. The samples were collected in a 30 MW full-scale circulating fludized bed (CFB) power plant during its normal operation using solid recovered fuel. Calcium and silicon were the main components in all deposits and Occurred throughout the deposit layers. Chlorine, Potassium, sodium, and sulfur compounds seem to be concentrated mainly near to the interface between the deposits and the probe surfaces.