Experiments on growth of diamond-like films (DLF) and diamond-like microcrystals were carried out by chemical vapor deposition (CVD) with pyrolitical decomposition of acetone (CH3COCH3) from gaseous acetone/Ar mixtures at high temperatures (1150-1200 degrees C). The DLF were grown onto (0011 Si substrates 2 in in diameter and the diamond and diamond-like microcrystals were CVD grown onto similar Si-wafers with deposited DLF. The morphology of the deposited films and the grown microcrystals were studied by scanning electron microscopy (SEM) and the elemental analysis was performed by energy-dispersive X-ray analysis (EDAX). The diamond-like sp(3)-hybridized bonds in the microcrystals were established by Raman spectroscopy. (C) 2008 Elsevier B.V. All rights reserved.