화학공학소재연구정보센터
Journal of Crystal Growth, Vol.311, No.3, 448-451, 2009
Growth behavior of nonpolar GaN on the nearly lattice-matched (100) gamma-LiAlO2 substrate by chemical vapor deposition
Nonpolar gallium nitride (GaN) epitaxial film was grown on a nearly lattice-matched (1 0 0) gamma-LiAlO2 Substrate by a versatile chemical vapor deposition (CVD) method. LiAlO2 single crystal was grown by the Czochralski (Cz) method. Epi-ready LiAlO2 Single-crystal substrate with RMS roughness of 0.24-0.32 nm were used for all experiments. The dependence of growth characteristics on the growth temperatures and deposition time was investigated. The orientation of GaN film was identified as (1 0 (1) over bar 0) m-plane by X-ray diffraction pattern. The characterization of detailed structure of the nonpolar GaN epilayer was done by transmission electron microscopy (TEM). Optical properties examined by photoluminescence spectra exhibit a strong near-band-edge emission peak at 3.37 eV and a weak yellow band emission. (C) 2008 Elsevier B.V. All rights reserved.