Two-dimensional photonic crystal (PhC), microdisk, and microring resonators with Ge self-assembled quantum dots are fabricated on silicon-on-insulator (SOI) using molecular beam epitaxy (MBE), electron beam lithography (EBL) and dry etching. The fabricated devices are tested by microphotoluminescence (mu PL) measurement at room temperature. Strong resonant room-temperature light-emission in the wavelength range 1.3-1.6 mu m is observed from all these microcavities. The intensity of photoluminescence is enhanced greatly in the microcavities. mu PL spectra show multiple resonant peaks, which corresponding to the multiple modes Supported the cavities. A quality factor around 3000 was achieved for the resonant peak in microring resonators with Ge dots, which is much higher than the values reported. (C) 2008 Elsevier B.V. All rights reserved.