CoFe2O4/BaTiO3 bilayer films were epitaxially deposited on SrTiO3 substrates by laser molecular beam epitaxy (LMBE). The growth process of the bilayer films was in-situ monitored by reflection high-energy electron diffraction (RHEED). Sixty nanometer thick-BTO layer was firstly fabricated in a layer-by-layer growth mode with an atomic smooth surface. CFO films with a varying thickness ranging from 5 to 60 nm were subsequently deposited on BTO-coated STO substrates. The different growth behaviors of CFO films were observed due to the lattice mismatch strain. Between two short stages of the growth mode transforming, a long duration with Stransky and Krastonov growth mode was maintained. Strainfully relaxed CFO film in the island growth mode was finally formed. High-resolution X-ray diffraction (HRXRD) was used to further analyze the strain effect. It was found that the tensile stress imposed on BTO by CFO was strengthened with increasing the thickness of CFO films, which could lessen the distortion of BTO by counteracting the compressive stress caused by STO substrates. The strengthened tensile stress weakened the ferroelectric property of BTO films by reducing structural tetragonality, which was demonstrated by polarization-electric (P-E) measurement. (C) 2009 Elsevier B.V. All rights reserved.