The high-quality ZnO single crystals were grown by seeded chemical vapor transport (CVT) in a newly designed ampoule using carbon as a transport agent. The well-faceted crystal of about 5 x 5 X 5 film 3 can be grown reproducibly. Secondary ion mass spectroscopy (SIMS) analysis, X-ray rocking curve (XRC) and photoluminescence (PL) measurements demonstrate that the grown single crystal is of high purity and high crystallinity. (C) 2009 Elsevier B.V. All rights reserved.