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Journal of Crystal Growth, Vol.311, No.15, 3813-3816, 2009
Influence of growth temperature on the selective area MOVPE of InAs nanowires on GaAs (111) B using N-2 carrier gas
The influence of temperature on selective area (SA) InAs nanowire growth was investigated for metal-organic vapor phase epitaxy (MOVPE) using N-2 as the carrier gas and (111) B GaAs substrates. In contrast to the growth temperature range - below 600 degrees C - reported for hydrogen ambient, the optimal growth temperature between 650 and 700 degrees C was 100 K higher than the optimal ones for H-2 carrier gas. At these temperatures, nanowires with aspect ratios of about 80 and a symmetric hexagonal shape were obtained. The results found are attributed to the physical and chemical properties of the carrier gas. (c) 2009 Elsevier B.V. All rights reserved.
Keywords:Nanostructures;Metal-organic vapor phase epitaxy;Selective epitaxy;Nanomaterials;Semiconducting III-V materials