화학공학소재연구정보센터
Journal of Crystal Growth, Vol.311, No.17, 4162-4166, 2009
High-resolution imaging of 1:1 [0001] ordered a-plane Al0.3Ga0.7N
We report the observation of ordering in Al0.3Ga0.7N as part of an epitaxial lateral overgrowth (ELO) of GaN carried out using (11 (2) over bar2) GaN templates grown by metal-organic chemical vapor deposition on m-plane sapphire. Transmission electron microscopy showed that the crystalline quality of the ELO GaN was greatly improved when the ELO SiO2 mask was patterned along the [11 (2) over bar0](sapphire) direction. The ELO GaN wings had an inclined columnar shape with smooth (0001) and (11 (2) over bar0) facets. Layers of 1: 1 [0001] ordered a-plane Al0.3Ga0.7N were observed on the a-plane GaN facets by high-resolution transmission electron microscopy and high-angle annular-dark-field scanning transmission electron microscopy. However, no ordering was observed for c-plane Al0.3Ga0.7N layers grown at the same time on the c-plane GaN facets. (C) 2009 Elsevier B.V. All rights reserved.