Photocatalytic titania thin films deposited on float glass by chemical vapor deposition were analyzed by transmission electron microscopy, atomic force microscopy, Raman spectroscopy, and X-ray diffraction. Raman spectroscopy results indicate its phase sensitivity in the presence of trace amount of anatase. This suggests a preferable method of using Raman spectroscopy to characterize mixed phases of titania thin films, especially when titania coatings are deposited on other crystalline oxide materials, for example, tin oxide.