The ever-increasing power demands and miniaturization of portable electronics, micro-sensors and actuators, and emerging technologies such as cognitive arthropods have created a significant interest in development of micro fuel cells. One of the major challenges in development of hydrogen micro fuel cells is the fabrication and integration of auxiliary systems for generating, regulating, and delivering hydrogen gas to the membrane electrode assembly (MEA). In this paper, we report the development of a hydrogen gas generator with a micro-scale control system that does not consume any power. The hydrogen generator consists of a hydride reactor and a water reservoir, with a regulating valve separating them. The regulating valve consists of a port from the water reservoir and a movable membrane with via holes that permit water to flow from the reservoir to the hydride reactor. Water flows towards the hydride reactor, but stops within the membrane via holes due to capillary forces. Water vapor then diffuses from the via holes into the hydride reactor resulting in generation of hydrogen gas. When the rate of hydrogen consumed by the MEA is lower than the generation rate, gas pressure builds Lip inside the hydride reactor, deflecting the membrane, closing the water regulator valve, until the pressure drops, whereby the valve reopens. We have integrated the self-regulating micro hydrogen generator to a MEA and successfully conducted fuel cell tests under varying load conditions. Published by Elsevier B.V.