화학공학소재연구정보센터
Journal of the American Chemical Society, Vol.131, No.47, 17062-17062, 2009
Homoleptic Gadolinium Guanidinate: A Single Source Precursor for Metal-Organic Chemical Vapor Deposition of Gadolinium Nitride Thin Films
Deposition of a rare earth nitride thin film using a chemical gas phase deposition technique is reported for the first time. The gadolinium tris-guanidinate complex [Gd[('PrN)(2)CNMe2}(3)] is found to be an effective single source precursor for the MOCVD growth of gadolinium nitride (GdN) thin films.