Journal of Vacuum Science & Technology A, Vol.26, No.6, 1511-1518, 2008
Preparation and thermal desorption properties of dc sputtered zirconium-hydrogen-helium thin films
We developed a new approach for preparing hydrogen and helium co-containing zirconium films (Zr-H-He) to simulate aging metal tritides. We also studied the effect of hydrogen on helium behavior, in which we applied direct current magnetron sputtering in a mixture of working gases (helium, argon, and hydrogen). The amount and depth profile of helium and hydrogen trapped in the films were determined using the elastic recoil detection analysis. The microstructure and surface morphology of the Zr-H-He films were studied by x-ray diffraction, transmission electron microscopy, and atomic force microscopy. To investigate the effect of hydrogen on the thermal release behavior of helium in the Zr film, thermal desorption spectrometry (TDS) was used, which revealed a similar desorption behavior to aged tritides. TDS experiments showed that the spectra were constituted by low-temperature peaks around 300 degrees C and high temperature peaks above 750 degrees C. Furthermore, the solid-phase alpha to delta transformation changed the shapes of the high-temperature peaks related to microstates of helium bubbles and caused the peak with a massive helium release shift toward lower temperature obviously.
Keywords:crystal microstructure;desorption;sputter deposition;surface morphology;thin films;transmission electron microscopy;X-ray diffraction;zirconium compounds