Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.27, No.2, 415-415, 2009 DOI10.1116/1.3085733 Export Citation Profile evolution simulator for sputtering and ion-enhanced chemical etching (vol 27, pg 130, 2008) Saussac J, Margot J, Chaker M Keywords:sputtering Please enable JavaScript to view the comments powered by Disqus.
