화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.27, No.3, 479-484, 2009
Rarefied gas flow through a thin slit into vacuum simulated by the Monte Carlo method over the whole range of the Knudsen number
A rarefied gas flow through a thin slit into vacuum is studied on the basis of the direct simulation Monte Carlo method. The mass flow rate and flow field are calculated over the whole range of the gas rarefaction from the free-molecular regime to the viscous one. A comparison to other results on the same problem available in literature is performed. An interpolating formula for the reduced flow rate is obtained.