화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.27, No.4, 712-715, 2009
Nitrogen stabilized reactive sputtering of optimized TiO2-x photocatalysts with visible light reactivity
Photoreactive and visible light responsive nonstoichiometric mixed-phase titania was prepared by reactive direct current magnetron sputtering. Trace amounts of nitrogen were added for process stabilization without being incorporated into the films. Based on the CO2 photoreduction tests and structural and optical characterization, the influence of the trace nitrogen on the sputtered nonstoichiometric TiO2 was studied and was compared to nitrogen-doped titania.