Journal of Vacuum Science & Technology B, Vol.26, No.6, 1860-1865, 2008
A new approach to fabricating high density nanoarrays by nanocontact printing
The authors introduce a new scheme of nanocontact printing that fabricates nanoarrays using stamps generated by ultraviolet nanoimprint lithography. Array patterns can be generated by this printing technique in a high density (number of features per unit area) fashion with a feature size as low as 30 nm and period of 100 nm. Sub-500 nm alignment accuracy for multilayer printing has been obtained using a traditional contact mask aligner. They also demonstrate that they can image a nanoarray labeled by streptavidin by atomic force microscope.
Keywords:atomic force microscopy;DNA;molecular biophysics;nanobiotechnology;nanocontacts;nanolithography;proteins;soft lithography;ultraviolet lithography