Nanoimprint templates were fabricated from diamondlike carbon (DLC) films grown on Si, using negative-tone e-beam lithography and oxygen plasma etching. An antiadhesion coating was provided through fluorocarbon-based plasma treatment, which was found to form a Teflon-like thin layer on the treated DLC surface. The fluorinated templates were used to imprint arrays of dots with diameters down to 10 nm in polymethyl-methacrylate. Application of the fluorocarbon plasma treatment was also demonstrated in the antiadhesion treatment of the nanoimprint resist and in elastomer molding.