Journal of Vacuum Science & Technology B, Vol.26, No.6, 2624-2627, 2008
Novel SU-8 optical waveguide microgripper for simultaneous micromanipulation and optical detection
A novel microgripper device structure with optical waveguides as arms is presented. The devices shown here have waveguide dimensions of 50x30 mu m(2). The device fabrication, using SU-8 polymer, is described. Its capability to perform micromanipulation while simultaneously carrying out optical detection is demonstrated.
Keywords:grippers;integrated optics;micromanipulators;micro-optomechanical devices;optical polymers;optical sensors;optical waveguides