화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.27, No.1, 152-155, 2009
Near field emission scanning electron microscopy
The authors report on the development of a "near field emission scanning electron microscope." In this instrument electrons are excited from the sample surface after undergoing interactions with, a primary beam of electrons field emitted from a polycrystalline tungsten tip. The tip, with an emission radius of 2 nm, is scanned at less than 80 nm distance to the surface. Topographic images, determined from the intensity variations of secondary and backscattered electrons, yield a vertical resolution on an atomic scale and a lateral resolution of a couple nanometers. The topographic contrast of the extracted electrons and the field emission current are indistinguishable, in agreement with theoretical models of optimal spatial resolution. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3071849]