화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.27, No.1, 193-197, 2009
Electrical properties of nanotip-assisted microplasma devices
Nanotip-assisted microplasma devices have been fabricated and characterized in Ne, Ar, or Ne/2% Ar. The electrical properties of the glow discharge in three different environments, Ne, Ar, and Ne/2% Ar, have been examined with direct current_(dc) bipolar-pulsed waveforms with frequencies from 2 to 20 kHz at pressures from 300 to 800 torr. The operating voltage of the nanotip-assisted microplasma devices was decreased around 10-20 V compared with devices without a nanotip electrode. The 6 x 1 cm panel-type microplasma device with nanotip electrodes revealed low discharge voltages around 300 V. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3043534]