The 4 in. wafer-scale production of probes tipped with single carbon nanofibers (CNF probes) for scanning probe microscope was achieved by an Ar+-ion-irradiation method. For the wafer-scale production, an arrangement of commercial-type Si cantilevers (tetrahedral Si tips), onto which single CNFs are grown, was optimized to contain 288 cantilevers in a 4 in. wafer. The ion-induced CNFs were then batch grown in the wafer scale. Scanning electron microscope observation of 50 of 288 probes randomly selected revealed that the CNFs were linear shaped, similar to 400 tun in average length and similar to 9 nm in average radius, and that similar to 80% of the probes batch grown were suitable for practical use as qualified probes. Atomic force microscope image of a densely distributed plastic nanocolumn array obtained by the batch-grown CNF probe was clearer and less distorted, compared to that attained by a conventional Si probe. Thus, the ion-irradiation method opened up new route for the wafer-scale production of CNF probes for practical daily use. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3043464]