화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.27, No.3, L8-L10, 2009
Pd-catalyzed hydrogen sensing with InN nanobelts
The use of Pd coatings on multiple InN nanobelts is shown to enhance their sensitivity for hydrogen sensing at hundreds of ppm level at 25 degrees C. Without the metal coating to catalyze dissociation of the hydrogen molecules, the InN nanobelts with Ohmic contacts at either end showed no detectable change in current when exposed to hydrogen under the same conditions. Moreover, the Pd-coated InN showed no response to CO2, C2H6, NH3, and O-2 (all in N-2 ambient). The relative resistance change in the Pd-coated sensors was not linearly dependent on the hydrogen concentration at dilute levels, i.e., 8% at 100 ppm H-2 and 9.5% at 1000 ppm H-2. The recovery characteristics of the sensors at room temperature after hydrogen sensing were also examined and similar to 50% of the initial InN resistance was recovered 10 min after sensor exposure to air. At higher temperatures, larger resistance changes and faster response and recovery were obtained. Pd-coated InN nanobelt sensors displayed much higher relative response than Pt-coated sensors.