The ISF (Joining and Welding Institute, RWTH Aachen University) is dealing with the adaptation of the long-established electron beam (EB) welding process to the special boundary conditions and requirements of the field of microapplications. A modified scanning electron microscope is being used as a micro-EB welding machine. Process-specific advantages offer the best preconditions for hybrid microassembly purposes. Joining of microcomponents presupposes optimal contact conditions, which are difficult to implement due to the ratio of forces during the joining process and also the low stiffness of the components. Besides the application of a suitable handling technique, the possibility to exert influence on the thermal distortion by symmetrical heating and solidification processes is of particular importance. The reproducibility of the welded joints is one of the great challenges in the field of microwelding. The investigations and developments done at the ISF show successful results in joining stainless steel sheet materials down to 30 mu m thickness and steel wire down to 50 mu m in diameter, whereas other materials (tungsten, aluminum, and titanium, nickel) are under investigation.