Using laser beam machining with ultrashort laser pulses, microstructures in the micrometer region can be manufactured in virtually all materials, regardless of their mechanical properties. However, machining times are slow if good surface qualities are required. Micro electrical discharge machining (EDM) is also capable of removing material nearly without process forces, but with a higher processing speed if structure sizes exceed a certain value. With the combination of both processes, specific advantages can be realized while disadvantages can be partially eliminated. Therefore, a hybrid machine tool was developed that combines the two processes of ultrashort pulsed laser ablation and EDM milling. No reclamping is necessary. In this study, the limitations and challenges of the single processes are investigated. After that, the novel hybrid machine tool is presented, along with strategies for the efficient and economic manufacturing of microstructures in materials that are difficult to machine by conventional processes.