화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.27, No.3, 1662-1666, 2009
Metal organic chemical vapor deposition growth and luminescence of ZnO micro- and nanowires
One dimensional (1D) ZnO heterostructures were deposited on C-plane sapphire using metal organic chemical vapor deposition at atmospheric pressure. Both catalyst-assisted and catalyst-free processes were investigated. In this latter case, growth parameters such as the substrate temperature, the oxygen/zinc ratio, or the carrier gas nature were varied in order to observe the modification of the film morphology. Different 1D shapes were produced, including rods, tubes, and needles, and were observed by scanning electron microscopy. Photoluminescence spectra reveal sharp excitonic transitions, and cathodoluminescence signals recorded along a ZnO conical needle exhibit a blueshift from the base to the top. The vapor-liquid-solid growth of ZnO nanowires using gold droplets was also successful.