Journal of Vacuum Science & Technology B, Vol.27, No.4, 1856-1860, 2009
Fabrication of ZnO nanorods by pulsed Nd:YAG laser ablation deposition
ZnO nanorods were fabricated on Si (100) substrate by pulsed laser ablation of ZnO target with background O-2 gas. Nd:YAG laser with wavelength of 532 nm was used as laser source. Field emitted scanning electron microscopy, x-ray diffraction, and Raman spectra were applied to characterize the surface morphologies and crystalline structures of the as-deposited ZnO nanorods. Photoluminescence (PL) was carried out to attain the optical properties of the as-deposited ZnO nanorods. It was found that ZnO nanorods have good crystallinity and sound optical properties. Their PL spectra with the strong and sharp ultraviolet peak were observed at room and low temperatures.
Keywords:elemental semiconductors;field emission electron microscopy;II-VI semiconductors;nanofabrication;nanostructured materials;photoluminescence;pulsed laser deposition;Raman spectra;scanning electron microscopy;silicon;surface morphology;wide band gap semiconductors;X-ray diffraction;zinc compounds