The self-similar growth scaling of TiO2, SiO2, and Al2O3 vertical post-glancing-angle deposited films has been characterized. Films were deposited using three deposition systems and four different deposition conditions. For a given film, good agreement was found with a self-similar growth model w(h)=w(0)h(p). For the materials studied here, p was found to increase with deposition angle, in contrast to some previous literature reports. Values of 0.017 +/- 0.005, 0.011 +/-0.005, and 0.014 +/- 0.005 deg(-1) were found for TiO2, SiO2, and Al2O3, respectively. (C) 2009 American Vacuum Society. [DOI:10.1116/1.3196782]