화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.27, No.6, 2801-2804, 2009
Fabrication of poly(3-hexylthiophene) self-switching diodes using thermal nanoimprint lithography and argon milling
In this article, the fabrication of poly(3-hexylthiophene) self-switching diodes (SSDs) is described. The unique design of the SSD enables it to be fabricated from a single layer of semiconductor material with a single lithographic step using nanoimprint lithography combined with argon milling. The resultant device morphology showed good uniformity and the SSDs exhibited pronounced current rectification and wide working voltage range.