Secondary-ion-mass spectrometry (SIMS) is a very powerful technique for surface and thin film characterization due to its high sensitivity and excellent depth resolution. However, it suffers from one major drawback that gives rise to very significant problems with quantification; the ionization yield of a given sputtered element may vary by several orders of magnitude depending on the composition of the matrix in which it is located (the so-called matrix effect). Storing Matter is a new analytical technique, which has been developed to avoid the SIMS matrix effect while keeping or even improving the excellent sensitivity of SIMS.