Superhydrophobic surfaces in Wenzel and metastable wetting state were prepared and the conversion of such surfaces to ultraphobic surfaces was reported by the application of a fine-scale roughness. Silicon nitride substrates with hexagonally arranged pillars were prepared by micromachining. The two-scale roughness was achieved by coating these substrates with 60 nm silica nanoparticles. The surface was made hydrophobic by silanization with octadecytrichlorosilane (OTS). Wettability studies of the silicon nitride flat surface, silicon nitride pillars, and the surfaces with two-scale roughness showed that a two-scale roughness can effectively improve the hydrophobicity of surfaces with a higher apparent contact angle and reduced contact angle hysteresis when the original rough surface was in a metastable or Wenzel state. This study shows the pathway of converting a metastable hydrophobic surface to an ultraphobic surface by the introduction of a fine-scale roughness, which adds to the literature a new aspect of fine-scale roughness effect.