The hierarchical structure silica Surface of inlaying silica nanoparticles along a regular pillar-like pattern is fabricated by embossing silica sol-gel precursor mixed with silica nanoparticles on glass substrates with an elastomeric mold. The substrate is further modified by a self-assembled fluorosilanated monolayer to reduce its surface energy. The advancing/receding contact angle measurements are performed to demonstrate that a water droplet on these surfaces can exhibit a transition from the Wenzel state to the Cassie state due to the addition of silica nanoparticles to enhance its surface roughness.