This work represents a new method to synthesis of ZnO anchor Zn nanoparticles by means of microwave plasma whose electrons are the reducing agents. Glass quadratic slides sized 2.5 x 2.5 cm were coated by ZnO and/or Zn particles whose sizes ranged from a few micrometers to similar to 20 nm The size of the particles can be controlled by the type of die precursor and its concentration, hi the current paper, the mechanism of the reactions of ZnO and/or Zn formation was proposed. Longer plasma irradiation and lower precursor concentration favor the fabrication of metallic Zn nanoparticles. The nature of the precursor's ion (acetate, nitrate, or chloride) is also of importance in determining the composition of the product. The glass slides coated by ZnO and/or Zn nanoparticles were characterized by HR-SEM, HR-TEM, A FM, XRD, ESR, contact angle and diffuse reflectance spectroscopy (DRS).