This paper introduces the homogeneously aligned liquid crystal (LC) display using ion beam (IB) bombardment of a new silicon oxynitride (SiON) alignment layer for the first time. The pretilt angle was shown to be a function of the IB incident energy, and possible mechanisms of LC alignment were investigated with physical and chemical methods. An X-ray photoelectron spectroscopy analysis showed that the LC alignment on the IB-bombarded SiON inorganic surface was due to the reformation of Si-O bonds as a major factor. The electro-optical characteristics were comparable to those of rubbed polyimide films. (C) 2009 Elsevier B.V. All rights reserved.