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Journal of the Electrochemical Society, Vol.155, No.6, H396-H400, 2008
Adsorption and desorption studies of glycine and benzotriazole during cu oxidation in a chemical mechanical polishing bath
The adsorption and desorption kinetics of glycine and benzotriazole (BTAH) in a peroxide-based solution have been studied using a microfluidic device. The changes in time in the open-circuit potential (OCP) of the working electrode were recorded. The OCP response demonstrates a transition consisting of two stages in the presence of BTAH and glycine. During the first similar to 10 s, the OCP response seems to follow the behavior of a glycine-only solution. After that, the BTAH adsorption behavior dominates. The desorption of glycine is characterized by a 10-20 s delay in changes in the OCP, followed by an abrupt change to the OCP. Desorption kinetics in the presence of BTAH are considerably more complex. The interplay between glycine and BTAH in a peroxide-based solution at short times is discussed. (c) 2008 The Electrochemical Society.