The ultrahydrophobic, conductive, and porous properties of microporous electrodes (MPEs) are successfully deposited by a reactive ion etcher with the CHF3 plasma treatment. The electrodes fabricated with CHF3 plasma exhibit a good water-repellent behavior due to hydrophobic groups such as -CF2 and -CF3 groups and the ultrahydrophobic properties are achieved when the water contact angle is greater than 130 degrees. The proton exchange membrane fuel cell performance, related to surface properties of Teflon-like MPEs, is studied by fuel cell system and X-ray photoelectron spectroscopy. The F/(C, H, S) ratio of fluorine-based precursor is the main parameter to adjust the conductivity, porosity, and ultrahydrophobicity of the electrodes. When the electrodes are fabricated with a F/(C, H, S) ratio of fluorine-based precursor of 1.5, it has a much more stable output density, with an optimal power output of 350 mW/cm(2) corresponding to a current density of 800 mA/cm(2), than that fabricated with a F/(C, H, S) ratio of fluorine-based precursor of 4 during the long-duration test.