화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.157, No.5, H574-H579, 2010
A Model-Based Analysis of Plasma Parameters and Composition in HBr/X (X=Ar, He, N-2) Inductively Coupled Plasmas
This work discusses the effect of gas mixing ratio on the HBr/X (X=Ar, He, or N-2) plasma parameters, steady-state densities, and fluxes of active species in the planar inductively coupled plasma reactor. The investigation combined plasma diagnostics by Langmuir probes and a global (zero-dimensional) plasma model with Maxwellian approximation for the electron energy distribution function. The dilution of HBr by Ar results in a maximum effect on the HBr electron impact dissociation kinetics and provides a favorable condition for an ion-assisted chemical reaction.