High quality solid electrolyte thin films was grown by pulsed laser deposition (PLD) using a high photon energy ArF excimer laser. Various amorphous thin films were successfully deposited on glass substrates from oxide targets; such as Li3PO4. LiBO2. Li2SiO3, Li2CO3, Li2SO4, Li2ZrO3, LiAlO2, Li2WO4 and Ohara glass ceramics. The morphology, optical property and ionic conductivity of these films were examined by optical microscope, UV-VIS spectroscopy and impedance analysis. Dramatic improvement of the film morphology was observed by using a high photon energy laser, while the broken film with many droplets was obtained by using lower ones. Ionic conductivity of the films was examined by impedance spectroscopy and dc polarization method. For example. an ionic conductivity of a Li3PO4 film was 4.6 x 10(-6) S cm(-1) at 25 degrees C with activation energy of 0.57 eV. Electronic conductivity measurements revealed that most of the films were pure lithium ion conductors, while a Li2WO4 film was a mixed conductor. (C) 2008 Elsevier B.V. All rights reserved.