A low voltage detection circuit for a capacitance sensor is important for connection to a low voltage digital circuit interface. We studied two different charge-balanced capacitance-voltage (C-V) conversion circuits configurations; the operational amplifier and the inverter amplifier. Both capacitance detection circuits were designed using 0.35 mu m CMOS circuitry technology. Both amplifiers used in the detection circuits were not affected by offset voltage. The current consumption for capacitance detection circuit was reduced from 250 mu A at V-dd 3.3 V to 38 mu A at V-dd 1.3 V by switching from an operational amplifier to an inverter amplifier. These circuits were packaged with one-side-electrode-type fluid-based inclination sensors on ceramic substrates. The size of the sensor is empty set 4.0 mm x 1.0 mm and pure propylene carbonate was used as electrolyte. Changes in temperature did not affect the output voltage of the sensor between -10 degrees C and 50 degrees C. This results show that the inverter amplifier used in the detection circuit was not affected by offset voltage and the output voltage V-m is depends only on capacitor ratio. The capacitance detection circuit using the inverter amplifier shows a high-sensitivity of about 7 mV/deg over the operational amplifier at V-dd 1.3 V. The response time, resolution and minimum moving angle of sensor were 0.7 s, 0.86 degrees and 0.4 degrees, respectively, at V-dd 1.3 V for the inverter amplifier type of capacitance detection circuit. (C) 2008 Elsevier Ltd. All rights reserved.