Advances in scanning probe microscopies (SPM) have allowed the mechanisms and rates of adsorption, diffusion and reactions on surfaces to be characterized by directly observing the motions of the individual atoms and molecules involved. The importance of oxides as thermal and photocatalysts, chemical sensors, and substrates for epitaxial growth has motivated dynamical SPM studies of oxide surfaces and their formation. Work on the TiO2 (110) surface is reviewed as an example of how dynamic SPM studies have revealed unexpected interactions between adsorbates and defects that influence macroscopic reaction rates. Studies following diffusion, adsorption and phase transitions on bulk and surface oxides are also discussed. A perspective is provided on advanced SPM techniques that hold great promise for yielding new insights into the mechanisms and rates of elemental processes that take place either during oxidation or on oxide surfaces, with particular emphasis on methods that extend the time and chemical resolution of dynamical SPM measurements.