Indium tin oxide (ITO) powder was synthesized from indium oxide and tin oxide powders by a solid-phase method using microwave heating and conventional heating methods. Microwave heating could reduce the treatment time necessary for the completion of the solid-phase reaction by 1/30. This decrease was attributed to an increase in the diffusion rate of Sn at the local heat spot in the indium oxide formed by microwave irradiation. However, microwave heating also decreased the amount of ITO produced, since the powder layer of the raw material was heated unevenly and had an uneven temperature distribution. Therefore, a microwave heating method including a mixing process was proposed in order to diminish the uneven progress of the ITO synthesis reaction in the powder layer. This revised method could increase the conversion to ITO, which is higher than that obtained by using the conventional heating method. Hence, the electric conductivity of the powder layer obtained by the proposed method was higher than that of the commercially supplied ITO powder layer. (C) 2009 The Society of Powder Technology Japan. Published by Elsevier B.V. and The Society of Powder Technology Japan. All rights reserved.