Both atmospheric pressure plasma and photo-catalyst metal oxide titanium dioxide (TiO2) are well known for their microorganism inactivation and chemical material decomposition abilities. In this work, radio-frequency atmospheric pressure plasma and TiO2 are used together to inactivate Bacillus subtilis spores that have a very high degree of environmental resistance to ultra-violet (UV) photons and heat. The combinational use of the plasma and TiO2 demonstrates an enhanced performance of B. subtilis spore inactivation by showing a decrease in the decimal reduction time of as large as 40% compared with the use of plasma alone. A significant increase of hydroxyl (OH) and excited oxygen atomic emission line (OH) intensities in the presence of TiO2 suggests that the atmospheric pressure plasma assisted by TiO2 is very effective at generating reactive oxygen radicals, which is known to be a dominant factor in bacterial spore inactivation. Possible TiO2 activation mechanism by the plasma is investigated. (C) 2009 Elsevier B.V. All rights reserved.