The surface discharges observed at rf windows and vacuum circuit breakers (VCBs) are one of the difficulties faced when developing high-power rf windows or compact VCBs. The surface discharge is considered to take place due to the release of the surface charges. Despite the importance of the surface charging/discharging, these phenomena have not been well evaluated. In this paper, the surface charges are estimated using the multipulse method, where electron beam irradiates a sample up to the saturation condition of surface charges. The amount of surface charges on alumina and TiN coated alumina are compared and the charging mechanism is discussed. (C) 2009 Elsevier B.V. All rights reserved.