We have investigated on the molecular beam epitaxy (MBE) of Te-doped GaSb films on ZnTe buffer. Te-doped GaSb (GaSb:Te) films with and without ZnTe buffer were grown on (0 0 1) GaAs substrates. GaSb: Te/ZnTe/GaAs film revealed higher mobility (=631 cm(2)/V s) in comparison to GaSb: Te/GaAs film (=249 cm(2)/V s). To explain the higher mobility of GaSb: Te on ZnTe buffer, dislocation density and temperature dependence of Hall measurement results were analyzed. Temperature dependence of Hall measurement shows strong influence of the dislocation scattering, which indicates that dislocation reduction by the ZnTe buffer enhances the carrier mobility of GaSb films. (C) 2009 Elsevier B. V. All rights reserved.