The plume expansion dynamics of an ablated target of Sm2O3, Nd2O3 and NiO mixture oxides by KrF laser into 0.2 mbar oxygen atmosphere has been investigated using fast imaging. The study was carried out for two different laser fluences 2 and 3 J cm (2). It was found that at early time delays, the expansion is still linear, independently of the laser fluence. However, as time evolves, the plume is decelerated and comes to rest. The plasma plume dynamics was analysed in the framework of Predtechensky and Mayorov model and drag model. It was found that Predtechensky and Mayorov model gives a general description of the plume expansion. However, at later time delays, it is rather the drag model which is valid. Furthermore, under the same conditions of pressure and fluences used for the plasma study, thin films were deposited at 4 cm from target surface and at temperature of 500 degrees C on (1 0 0) silicon substrates. The obtained layers were characterized by atomic force microscopy and electron dispersive X-ray spectroscopy diagnostics. A correlation between the films properties and the plasma plume dynamics was found. (C) 2009 Elsevier B. V. All rights reserved.