Applied Surface Science, Vol.256, No.5, 1452-1454, 2009
Preparation of ZnMgO:Ga thin films on flexible substrates by pulsed laser deposition
Transparent conducting ZnMgO:Ga films were deposited on flexible PET substrates by pulsed laser deposition (PLD). Effects of deposition pressure and time on the structural, electrical and optical properties of ZnMgO: Ga films were investigated. The films showed a low resistivity about 7.68 x 10 (4) Omega cm when deposited at the pressure of 0.03 Pa for 40 min. All the films exhibited a high transmittance over 80% in the visible and near-ultraviolet region. The band gap of as-grown films was about 3.50 eV. (C) 2009 Published by Elsevier B.V.